2 results
Vapor HF Etching for Low Temperature Silicon Epitaxy
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- Journal:
- MRS Online Proceedings Library Archive / Volume 259 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 479
- Print publication:
- 1992
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- Article
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NH4F Pre-Cleaning of Silicon (100) for UHV-CVD Epitaxy
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- Journal:
- MRS Online Proceedings Library Archive / Volume 259 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 499
- Print publication:
- 1992
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- Article
- Export citation